PHASE 1: Position Units & Rough
Level
|
|
PHASE 2: Fine Leveling & Accessories
|
- fine level of system (includes all process stations &
plates, robotics, transfer stages, & process cups)
- attach all accessories
|
PHASE 3: Line & Cable Interconnects
|
- connect all power lines
- connect all communication cables
- terminate all water lines
- terminate all chemical lines
- connect T/H unit ducting
|
PHASE 4: System Start-up & Verify Facilities
|
- set all facilities to equipment specifications
- pre-power on checks
- post-power on checks
- clear all alarms
|
PHASE 5: Unit Position Adjustments
|
- carrier station position adjustments
- align PRA pincettes
- pin/shutter speed controller adjustments
- spin unit position adjustments
- process plate position adjustments
- spinner rotation speed checks
- interface position adjustments
- reliability transfer checks through all stations
- inline setup and transfer checks with stepper/scanner
|
PHASE 6: Environmental Setup
|
- thermo-controller unit setup
- hotplate exhaust balancing
- hotplate temperature calibrations
- exhaust controller calibrations
- WEE unit calibrations
- environmental control calibrations (cup temp. & humidity, wind velocity, positive pressure,
chemical temps)
|
PHASE 7: Chemical Intro & Dispense Setup
|
- pre-wet filters
- purge chemical lines
- introduce process chemicals
- adhesion unit setup
- coater dispense setup (SOL nozzle dispense positions, nozzle heights, solvent dispense calibrations)
- developer dispense setup (DEV & DIW nozzle dispense positions, nozzle heights, DEV &
DIW dispense calibrations)
- pre-process resist setup (suckback setup, pump dispense calibration, EBR cut width adjustments)
|
|
PHASE 8: Turn Over to Customer
|
- remake all interlocks
- back up hard drive
- complete list of outstanding discrepancies
- complete & turnover installation checklist
|
