Support Services

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Maintance
 
Whether you are experiencing electrical, mechanical, or process issues our TECHNICAL SPECIALISTS can assist in rapidly resolving your problem and getting your system back into production.
 
PLUS also provides PREVENTIVE MAINTENANCE services.  We will work with you in performing and scheduling your monthly, quarterly, and annual PMs. 
 
Please utililize our FREE phone support.  This service is available to all customers who are looking for answers to specific technical questions, looking for particular equipment specifications, or inquiring about troubleshooting suggestions.
 
 

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Process Support
 
Our personnel are also capable of resolving many process issues including those involving resist thickness/uniformity, CD uniformity, particle/FM, and adhesion contact angle.
 
 

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Training
 
In order to get the most out of your TEL track, PLUS LLC provides on-site training.  Let our specialists assist you in learning anything from basic OPERATIONS to more indepth SERVICE funtions.
 
 

PLUS LLC is not associated with Tokyo Electron Limited (TEL) or any subsidiary of TEL.