• The removal of all chemical (resist, solvent, developer, HMDS, etc)
• A comprehensive solvent, IPA, or DIW flush through all buffer tanks, degas modules, dispense lines (from source to nozzle), pumps, drain & vent lines
• An N2 purge of all chemical systems for a duration of at least eight hours
• The securing of all support equipment including temperature controlled water and T/H units
• The securing of all robotics, arms, and process modules
• The securing of all panels, doors, and drawers
• The securing of all electrical cabling and tubing
• The deletion of all proprietary information from hard drives
• The removal of all accessories
• A detailed inventory of the system

Upon your request, we will gladly submit to you our decommission procedure for your review.