Repair Services

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PLUS LLC is capable of repairing a variety of modules and subassemblies.  Please view the table below for a list of some of the items that we can repair or refurbish. 
 
All repaired and refurbished items are tested to meet or exceed OEM specifications. 
 

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SMC Circulating Pumps & Power Supplies

  • INR-244-26
  • INR-244-71
  • INR-244-97A-B
  • INR-244-97B-B-X5
  • INR-244-100
  • INR-244-103A
  • INR-244-110D
  • INR-244-112B
  • INR-244-113B
  • INR-244-200
  • INR-244-201
  • INR-215
  • INR-216
  • INR-217
  • INR-218

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UV Light Sources
 
  • Hoya-Schott UL200T
  • Hoya-Schott HU250T

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Drivers
 
  • Panasonic MSD013A1X
  • Panasonic MSD011A1XX11
  • Panasonic MSD5A1A1X
  • Panasonic DV468TC
  • NSK ESA
  • Sanyo Denki PMM-BD-5702
  • Sanyo Denki PMM-BA-5653
  • Yaskawa Servo Pack CACR-02-TE1K
  • Yokogawa SR1100A02

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Boards
 
  • Motor I/O Brd
  • Oven I/O Brd
  • Spinner I/O Brd
  • WEE I/O Brd
  • Chemical I/O Brd
  • PS Panel I/O Brd
  • Ghost Terminator Brd
  • IFB Add On Brd
  • E5ZE
  • Analog Brd
  • DC/DC Converter
  • Ope. Pane Conn Brd
  • Arm I/F Brd
  • Coat Unit Conn Brd
  • E5ZD
  • Coat User Brd
  • Divide Monitor Brd #2 & #3
  • Oven Conn Brd
  • Mult Opt Conn Brd 7

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AC & DC Power Supplies
 
  • Power Distribution Box MSE181B & MSE181E
  • DC Backup Module MSE181D & MSE181G 
  • AC Power Box TKLCT8-M508
  • AC Power Box TKLCT8-M509
  • DC Power Box DP8-CT-01A/TEL

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Controllers
 
  • FC-9801F
  • FC-9821Ke
  • ACT Controller #02
  • ACT Controller #03

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Process Plates
 
  • Cool & Chill Plates (COL, CPL)
  • Chilling Hotplates (CHP)
  • High & Low temperature hotplates (HP, LHP, HHP, DHP)
  • Adhesion stations (ADH)

 

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Cable Replacement
 
  • (UL)E69070 16AWG/2 type STO 90C Chugoku
  • (UL)E69070 14AWG/2 type STO 90C Chugoku
  • (UL)E69070 14AWG/3 type STO 90C Chugoku
  • (UL)E69070 12AWG/3 type STO 90C Chugoku
  • (UL)E69070 10AWG/2 type STO 90C Chugoku
  • (UL)E69070 8AWG/2 type STO 90C Chugoku
  • (UL)E69070 8AWG/3 type STO 90C Chugoku
  • EMO cable UL101SAWG20 Fujikura

 

PLUS LLC is not associated with Tokyo Electron Limited (TEL) or any subsidiary of TEL.