ENHANCEMENT	BENEFIT
Increased Throughput	270 WPH with four front scrubbing units (using 38 secs of process time/unit) 135 WPH with two front & two back scrubbing units (using 38 secs of process time/unit)
Smaller foot print design	No external power AC rack
New Windows OS based Scheduler Software with PC Controller	Allows for one recipe for one wafer (max 25 recipes for one lot) Online SECS/GEMS compatible built-in software Wireless control touch panel display for easy maintenance Full operation log data storage
Non-DNS OEM Parts	Lower lead time for parts Lower prices for parts No specialized OEM components required Recent conventional market items such as motors & drivers