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TOOL ENHANCEMENTS
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BENEFIT
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LED UV Lamp Housing Upgrade |
- Longer life time
- No standby time for light up
- No shutter or light guide required
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- Removal of micro bubbles in solvent or develop solution
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Chemical Supply Enhancements |
- Resist bar code system
- Resist flow monitoring system
- Micro bubble monitoring system
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Upgrade to Advanced Interface
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- Changes normal IFB to advanced IFB
- Increased throughput
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High Speed Robot Upgrade
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- ACT8 PRA increases 12% WPH
- ACT8 IRA increases 12% WPH
- ACT8 CRA increases 12% WPH
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Battery-less Voltage Sag Protection
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- No maintenance required
- No battery replacement
- 2 year warranty
- 3 phase protection
- Small foot print
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